| 摘要 |
<p><P>PROBLEM TO BE SOLVED: To provide a vacuum carburizing furnace capable of detecting clogging of a gas nozzle, having a simple structure and inexpensive facility costs and maintenance costs. <P>SOLUTION: In the vacuum carburizing furnace 1, a vacuum carburizing camber 4 surrounded by a heat insulator 3 is provided in a furnace shell 2 connected to a vacuum exhaust device, and carburizing gas in introduced into the vacuum carburizing chamber 4 to carry out vacuum carburizing of an object W to be processed. Nozzle headers 12 extending in a furnace length direction and plurally juxtaposing gas nozzles 11 in the furnace length direction, piercing the heat insulator 3 and opened into the vacuum carburizing chamber 4 are plurally juxtaposed in a space 10 between the furnace shell 2 and the heat insulator 3. Each nozzle header 12 is connected to a main header 13 provided in the space 10, the main header 13 is connected to a carburizing gas input opening 14, and a thermometer for gas nozzle surface temperature detection is attached as a clogging detection means of the gas nozzle 11 on a surface part of an insulator 3 outer side position of each gas nozzle 11. <P>COPYRIGHT: (C)2009,JPO&INPIT</p> |
