MICROFABRICATED ELASTOMERIC VALVE AND PUMP SYSTEM

摘要

PROBLEM TO BE SOLVED: To provide a method of fabricating an elastomeric valve structure. SOLUTION: The method of fabricating an elastomeric valve structure comprises: forming a first elastomeric layer 20 on top of a micromachined mold, the micromachined mold having a first raised protrusion which forms a first recess extending along a bottom surface of the first elastomeric layer 20; forming a second elastomeric layer 22 on top of a micromachined mold, the micromachined mold having a second raised protrusion which forms a second recess extending along a bottom surface of the second elastomeric layer 22; bonding the bottom surface of the second elastomeric layer 22 onto a top surface of the first elastomeric layer 20 such that a control channel forms in the second recess between the first and second elastomeric layers 20, 22; and positioning the first elastomeric layer 20 on top of a planar substrate such that a flow channel 32 forms in the first recess between the first elastomeric layer 20 and the planar substrate. COPYRIGHT: (C)2009,JPO&INPIT