| 摘要 |
<P>PROBLEM TO BE SOLVED: To improve piezoelectric performance and operational stability, in a piezoelectric device having a piezoelectric film. <P>SOLUTION: This piezoelectric device 1 includes a first electrode 21, a first piezoelectric film 13, a second piezoelectric film 14, and a second electrode 23 in this order on a substrate 11, and is provided with an intermediate electrode 22 between the first piezoelectric film 13 and the second piezoelectric film 14. Each of the first and second piezoelectric films 13 and 14 has a thickness not larger than 10 μm. The surface roughness Ra of surfaces of the first and second piezoelectric films13 and 14 on the side opposite to the substrate 11 and/or surfaces thereof on the substrate 11 side is not larger than 0.5 μm. <P>COPYRIGHT: (C)2009,JPO&INPIT |
