MANUFACTURING METHOD OF PIEZOELECTRIC ELEMENT, MANUFACTURING METHOD OF DIELECTRIC LAYER, AND MANUFACTURING METHOD OF ACTUATOR

摘要

PROBLEM TO BE SOLVED: To provide a manufacturing method of a piezoelectric element which suppresses variations of titanium content rates in respective parts in a dielectric layer, and has the dielectric layer with good characteristics.

SOLUTION: The manufacturing method of the piezoelectric element 100 includes a process for forming a lower electrode 20 above a base 10, a process for forming the dielectric layer 30 by performing a set of a first process for forming a precursor layer with a plurality of raw material layers laminated above the lower electrode 20, and a second process for forming a layered part 311 by crystallizing the precursor layer at one time or a plurality of times, and a process for forming an upper electrode 40 above the dielectric layer 30. The dielectric layer 30 is formed of perovskite oxide represented by general formula ABO3. The A site contains lead (Pb), the B site contains zirconium (Zr) and titanium (Ti). An average titanium content ratio of the plurality of the raw material layers is smaller than an average titanium content ratio of the lower raw material layer.

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