| 摘要 |
PROBLEM TO BE SOLVED: To provide a three-dimensional shape measuring apparatus capable of improving the measuring accuracy of three-dimensional shape. SOLUTION: A three-dimensional measuring apparatus includes a work stage for fixing a measuring object; a projection part including a light source, a grating through which the light irradiated from the light source is penetrated, and a projection lens imaging a grating image of the grating on the measuring object, and allowing grating image light to be incident onto the measuring object by N times in a first direction and then allowing grating image light to be incident onto the measuring object by N' times in a second direction, wherein N and N' are natural numbers greater than or equal to two; an image receiving device including an imaging lens and a camera and receiving a first direction reflection image and a second direction reflection image reflected by the measuring object; and a control part compensating for a shadow region of the measuring object by using the first direction reflection image and the second direction reflection image received by the image receiving device to compute the three-dimensional state of the measuring object. COPYRIGHT: (C)2009,JPO&INPIT
|
