| 摘要 |
PROBLEM TO BE SOLVED: To provide a hard carbon film having excellent wear resistance and low friction performance even in the atmosphere and under a non-lubricant environment. SOLUTION: A Cr intermediate layer 41 and a composition gradient layer 42 are deposited on a base material 12 containing high melting point metals such as Fe, Co and Ni to enhance the adhesiveness between layers, and a hard carbon film 43 containing, by atom, Mo element of 2.7 to 7.7%, S element of 1.3 to 4.6%, and O element of 7.0 to 9.5% is deposited thereon to the thickness of 0.2 to 0.3μm. COPYRIGHT: (C)2009,JPO&INPIT
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