发明名称 |
MULTI-AXIAL SENSOR FOR DETERMINING DISPLACEMENT, VELOCITY AND ACCELERATION OF A LINEAR OR ANGULAR MOVEMENT |
摘要 |
A MEMS multiaxial inertial sensor of angular and linear displacements, velocities or accelerations has four comb drive capacitive sensing elements (18) integrated on a planar substrate (12), each having an output responsive to displacement along a Z axis, and responsive to a displacement along X or Y axes. The sensing elements are located at different parts of the substrate on both sides of the X axis and the Y axis, the outputs being suitable for subsequently deriving linear displacements along any of the X, Y or Z axes and angular displacements about any of the X, Y or Z axes. Fewer sensing elements are needed to sense in multiple directions, making the device more cost effective or smaller. Linear or angular movement is determined from combinations of the sensor signals. |
申请公布号 |
WO2009013666(A3) |
申请公布日期 |
2009.03.12 |
申请号 |
WO2008IB52839 |
申请日期 |
2008.07.15 |
申请人 |
NXP B.V.;VERJUS, FABRICE;GIRIDHAR, ARCHIT |
发明人 |
VERJUS, FABRICE;GIRIDHAR, ARCHIT |
分类号 |
G01P15/08;G01C19/56;G01P15/125 |
主分类号 |
G01P15/08 |
代理机构 |
|
代理人 |
|
主权项 |
|
地址 |
|