APPARATUS AND METHOD FOR MONITORING AND REGULATING CRYOGENIC COOLING
摘要
An apparatus and method for monitoring and/or controlling cryogenic cooling by measuring the opacity of the vapor cloud (113) generated from a cryogenic cooling device (112). The opacity is determined by measuring the reduction in intensity of a light beam (127) passed through the vapor cloud (1 13). The opacity measurements are used to control an operating parameter of the system, such as the cooling rate of the cryogenic cooling device (1 12). The opacity measurements may be normalized to compensate for variables, other than temperature of the workpiece (119) and cooling rate, which may affect the opacity of the vapor cloud (113).
申请公布号
WO2009032689(A2)
申请公布日期
2009.03.12
申请号
WO2008US74465
申请日期
2008.08.27
申请人
AIR PRODUCTS AND CHEMICALS, INC.;ZURECKI, ZBIGNIEW;KNORR, ROBERT, ELLSWORTH;GREEN, JOHN, LEWIS
发明人
ZURECKI, ZBIGNIEW;KNORR, ROBERT, ELLSWORTH;GREEN, JOHN, LEWIS