| 摘要 |
<P>PROBLEM TO BE SOLVED: To correct a measuring error due to the main body of a surface position sensor, measure the position of a movable body in terms of a specified surface in the vertical direction and inclination direction by using the corrected surface position sensor, and accurately drive the movable body in two-dimensional manner. <P>SOLUTION: The surface position sensor comprised of a focus sensor FS is used to measure the surface position of a measuring surface S on a stage, and the measured result is compared with that of another sensor such as an interferometer, for example. Thus, the presence or absence of a measuring error due to the main body of the surface position sensor such as inclination of the focus sensor FS to the measuring surface S or the like is verified, and correction data is prepared to correct the measuring error. The surface position of the measuring surface S on the stage is measured by the surface position sensor on the basis of the corrected data, and the stage is accurately driven two-dimensionaly according to the measured result. <P>COPYRIGHT: (C)2009,JPO&INPIT |
