| 摘要 |
<P>PROBLEM TO BE SOLVED: To provide a tool 1 for evaluating a pellicle film, a method for evaluating a pellicle film and a tool for evaluating a thin film by which foreign matter analysis on the top side and the back side and in local of a pellicle film 13 can be stably carried out. <P>SOLUTION: The tool 1 for evaluating a pellicle film, in a frame-like shape for evaluating foreign matter 14 on a pellicle film 13 of a pellicle comprising the pellicle film 13 and the pellicle frame comprises: a holding section 10 having a face 15 where the pellicle film 13 is stretched; a frame section 11 pinching the pellicle film 13 with the peripheral part of the holding section 10; and a bending preventing section 12 provided inside the face 15 and having an end part 16 capable of popping up from the face 15 where the pellicle film 1 is stretched, with the height of the end part 16 variable to prevent the pellicle film 13 from bending. <P>COPYRIGHT: (C)2009,JPO&INPIT |
