PASTE COATING METHOD AND APPARATUS

摘要

PROBLEM TO BE SOLVED: To improve a drawing accuracy of a paste pattern by eliminating the positioning deviation of each nozzle even when the positioning deviation of the discharge ports of a plurality of nozzles occurs with the exchange and the attachment and detachment of the nozzles. SOLUTION: A paste coating apparatus 10 in which paste discharged from the plurality of the nozzles 24A-26A is applied on a plurality of positions of a substrate 1 to draw a plurality of paste patterns on the substrate 1 is provided with detecting devices 31-33 for detecting actual positions P1-P3 coated with the paste from respective nozzles 24A-26A and a control means 30 for performing control to relatively move the respective nozzles 24A-26A to the substrate 1 to eliminate the positioning deviation by computing the positioning deviation of the detected actual positions P1-P3 with the paste applied thereto to target coating positions P10-P30 of the paste in every respective nozzles 24A-26A. COPYRIGHT: (C)2009,JPO&INPIT