| 摘要 |
PROBLEM TO BE SOLVED: To provide a substrate processing method for forming on a substrate a thermoplastic film having a flat surface. SOLUTION: The substrate processing method includes a forming process for forming a thermoplastic film on a substrate, a pressing process for pressing the film after heating the film or pressing while heating the film, and a cooling process for cooling the film together with the maintaining of the state of pressing the film. COPYRIGHT: (C)2009,JPO&INPIT
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