发明名称 |
Surface profile measuring apparatus |
摘要 |
A surface profile measuring apparatus of the invention has a changing section for changing the cross section of a flux of light to be projected onto a sample by a light projecting section in measuring a surface profile of the sample. The surface profile measuring apparatus having the above arrangement enables to measure the surface profile of the sample easily and precisely, without using different kinds of measuring apparatuses.
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申请公布号 |
US2009070068(A1) |
申请公布日期 |
2009.03.12 |
申请号 |
US20080231057 |
申请日期 |
2008.08.28 |
申请人 |
ASO KOHEI;TAKEBE YOSUKE;MATSUMOTO JUN |
发明人 |
ASO KOHEI;TAKEBE YOSUKE;MATSUMOTO JUN |
分类号 |
G01B11/24 |
主分类号 |
G01B11/24 |
代理机构 |
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代理人 |
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主权项 |
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地址 |
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