| 摘要 |
Provided is a test apparatus that tests a device under test, including a test head that generates a test signal for testing the device under test; a socket board onto which is mounted the device under test, that transmits signals between the test head and the device under test; a plurality of actuators that are disposed on a lower surface of the socket board to correspond one-to-one with support positions thereof, and that each have a state thereof changed according to a control signal supplied thereto to independently move the corresponding support position in a direction vertical to the lower surface of the socket board; and a connection control section that supplies a first control signal to each actuator to set each actuator to be in the same state, and thereafter supplies commonly to each actuator a second control signal that gradually decreases an apparatus separation distance between the socket board and the test head.
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