| 摘要 |
PROBLEM TO BE SOLVED: To provide a conveying device for horizontally conveying a substrate in a vacuum chamber which is capable of reducing generation of particles caused by the friction between a carrier means and a carrier, and reducing the maintenance frequency caused by the wear between the carrier means and the carrier. SOLUTION: A first magnet 15 is arranged on a carrier 6. A second magnet 25 having the same polarity as that of the first magnet on the opposing surface is arranged on a part of a carrier supporting means 21 opposite to the first magnet 15 via a space from the first magnet 15. The repulsive force between the first magnet 15 and the second magnet 25 is applied so as to raise the carrier 6 upwardly, the self weight of the carrier 6 on a guide roller 22 of the carrier supporting means 21 is reduced, and the friction between the guide roller 22 and a guide rail part 13 is reduced. COPYRIGHT: (C)2009,JPO&INPIT
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