| 摘要 |
PROBLEM TO BE SOLVED: To provide a stocker device capable of effectively using a space of a clean room, and being increased even if a vacant space is not available on a floor in the clean room and a storage shelf cannot be installed. SOLUTION: The stocker device comprises a storage shelf portion 10 having the storage shelf 14 for storing a carrier in a flat state, a transfer handling portion 50 having a hoist mechanism portion 80 wherein chuck mechanism 81, 82 arranged above the storage shelf portion 10 and chucking the carrier 1 are driven in XY-axis directions, and hoist devices 142, 143 carrying the carrier 1 from a previous process to the storage shelf portion 10 or carrying the carrier 1 from the storage shelf portion 10 to the next process. A frame body 51 of the transfer handling portion 50 is integrally fixed on a frame body 13 of the storage shelf portion 10, and the frame body 51 of the transfer handling portion 50 is suspended from a ceiling 2. COPYRIGHT: (C)2009,JPO&INPIT
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