SHAPE MEASUREMENT APPARATUS AND METHOD

摘要

A shape measurement apparatus and method using a laser interferometer are disclosed. The shape measurement apparatus includes a plurality of laser devices, which generate beams, emit a beam of a specific frequency from among the generated beams, and output interference signals for detecting wavelengths of the generated beams, and a controller for detecting the wavelengths of the generated beams from the outputted interference signals, and controlling the laser devices on the basis of the detected wavelengths. The optical unit projects the beam of the laser device on a target object, and generates an interference pattern of the object. Several shutters are closed and opened. If the shutters are closed, they prevent the beam of each laser device to be projected on the optical unit. An image pickup unit captures the interference pattern.