| 摘要 |
<p><P>PROBLEM TO BE SOLVED: To provide a high picture quality X ray detecting device which can suppress influences of an X ray reflected from the rear surface of the an X ray detecting element 5. <P>SOLUTION: An X ray detecting device includes a plurality of substrates 1a as a plurality of laminated insulating layers 1, a plurality of connection pads 2 for flip-chip mounting of an X ray detecting element 5 on the upper surface of the substrate 1a, a plurality of terminal electrodes 3 formed on outer surfaces of the substrate 1a, and internal wiring 4 including a plurality of through conductors 4a located in the lower part of a mounting region 5a for connecting the connection pads 2 and the terminal electrodes 3. The insulating layers 1 and interlayer conductor layers 6 between the plurality of insulating layers 1 are formed to include the mounting region 5a in a projection area for the upper surface of the substrate 1a, the plurality of through conductors 4a pass through the interlayer conductor layers 6 to be isolated from the interlayer conductor layers 6, and at least one of the interlayer conductor layers 6 and the insulating layers 1 positioned between the interlayer conductor layers 6 is inclined to the lamination direction of the insulating layers 1. The interlayer conductor layers 6 can shield reflected X rays to suppress influences of the reflected X rays. <P>COPYRIGHT: (C)2009,JPO&INPIT</p> |
