发明名称 |
EMERGENCY MACHINE OFF FEATURE WITH SAFETY CONTROL INTERFACE |
摘要 |
An apparatus for implementing an emergency machine off circuit of a fabrication system, includes: at least one safety switch adapted for shunting an operation enable signal from a piece of equipment selected for removal from service, the switch also removing from service supplemental devices for the selected equipment. A semiconductor fabrication system and a method for removing equipment from service are provided.
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申请公布号 |
US2009066502(A1) |
申请公布日期 |
2009.03.12 |
申请号 |
US20070854035 |
申请日期 |
2007.09.12 |
申请人 |
INTERNATIONAL BUSINESS MACHINES CORPORATION |
发明人 |
BOETTCHER GREGORY S.;COPELAND WILLIAM R.;DEGEORGE JOSEPH P.;HARGASH SCOTT M.;PETRY WILLIAM T.;YOUNG, JR. ROBERT R. |
分类号 |
G08B1/08 |
主分类号 |
G08B1/08 |
代理机构 |
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代理人 |
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主权项 |
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地址 |
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