发明名称 |
APPARATUS AND METHOD FOR THE APPLICATION OF A MATERIAL LAYER TO DISPLAY DEVICES |
摘要 |
The invention relates to a method and apparatus for the application of material to form a layer of an organic electroluminescent device. The material is sputter deposited typically from at least one target of material held in respect to a magnetron in a coating chamber. The magnetrons used can be unbalanced magnetrons and/or are provided with other magnetrons and/or magnet arrays in a closed field configuration. The material is found to be deposited in a manner which prevents or minimises damage to the device and hence reduces or removes the need for a barrier layer to be applied.
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申请公布号 |
US2009065741(A1) |
申请公布日期 |
2009.03.12 |
申请号 |
US20060816494 |
申请日期 |
2006.02.16 |
申请人 |
APPLIED MULTILAYERS LIMITED;CAMBRIDGE DISPLAY TECHNOLOGY LIMITED |
发明人 |
WALLS JOHN MICHAEL;GIBSON DESMOND;YOUNG WILLIAM;PATEL NALINKUMAR;ANATHASSOPOULOU NICOLETTA |
分类号 |
C23C14/35;C09K11/06;C23C14/00;C23C14/08;C23C14/50;H01J37/34;H05B33/10 |
主分类号 |
C23C14/35 |
代理机构 |
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代理人 |
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主权项 |
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地址 |
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