| 发明名称 |
MULTI-REGION PROCESSING SYSTEM AND HEADS |
| 摘要 |
The various embodiments of the invention provide for relative movement of the substrate and a process head to access the entire wafer in a minimal space to conduct combinatorial processing on various regions of the substrate. The heads enable site isolated processing within the chamber described and method of using the same are described.
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| 申请公布号 |
US2009068849(A1) |
申请公布日期 |
2009.03.12 |
| 申请号 |
US20070965689 |
申请日期 |
2007.12.27 |
| 申请人 |
ENDO RICK;WEINER KURT;DE INDRANIL;TSUNG JAMES;ZHAO MAOSHENG |
发明人 |
ENDO RICK;WEINER KURT;DE INDRANIL;TSUNG JAMES;ZHAO MAOSHENG |
| 分类号 |
H01L21/31;C23C16/00 |
主分类号 |
H01L21/31 |
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