| 发明名称 |
Oscillating scanning probe microscope |
| 摘要 |
A scanning probe microscope that is easy to use, inexpensive to manufacture, has a fast scan rate, and has a broad range of applications. The oscillating sensor has a high resonance frequency. Because an oscillator is used, alignment of a laser is not required. Further, probe approach and scanning can be achieved at much faster rates.
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| 申请公布号 |
US2009070904(A1) |
申请公布日期 |
2009.03.12 |
| 申请号 |
US20080214081 |
申请日期 |
2008.06.16 |
| 申请人 |
WEST PAUL E;BECKER RICHARD S;PENG ZHIQIANG |
发明人 |
WEST PAUL E.;BECKER RICHARD S.;PENG ZHIQIANG |
| 分类号 |
G01B21/30;G01Q20/00;G01Q30/02;G01Q60/32;G01Q60/38;G01Q70/04;H01J3/14;H01J5/16 |
主分类号 |
G01B21/30 |
| 代理机构 |
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代理人 |
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