| 摘要 |
PROBLEM TO BE SOLVED: To provide a low-cost, high-precision and high-resolution charged particle beam converging optical system for solving problems on a conventional revolution-symmetry aberration correcting system. SOLUTION: In a radial plane having an angle parted by a natural number whose partition number is greater than 2 with the beam radial axis of a charged particle beam generated by a charged particle beam source, as an axis of revolution, a coil group is arranged along the beam radial axis. A superimposed magnetic field is generated on the incident axis of the charged particle beam to control the orbit of the charged particle beam. COPYRIGHT: (C)2009,JPO&INPIT |
