| 摘要 |
<P>PROBLEM TO BE SOLVED: To provide a method of manufacturing a piezoelectric element whose expansion and contraction due to temperature change is suppressed enough. <P>SOLUTION: A piezoelectric substrate 1 is mainly constituted of a base 11, and a film 12 formed on one of principal surfaces of the base 11. The principal surface of the base 11, where the film 12 is formed, is a mirror-finished principal surface 11a. The piezoelectric substrate 1 is obtained by directly forming the film 12 made of a material having a linear coefficient of expansion smaller than that of the base 11 on the mirror-finished principal surface 11a through the use of a coating method using slurry. <P>COPYRIGHT: (C)2009,JPO&INPIT |
