| 摘要 |
<P>PROBLEM TO BE SOLVED: To provide a motion sensor, whose beam portion is hardly damaged and noise immunity is high, and to provide a method of manufacturing the same. <P>SOLUTION: The motion sensor includes the beam portion of a laminated film structure containing two electrode films and a piezoelectric film joined to the two electrode films and having a free end, a protective portion which is composed of a film, has conductivity, is grounded, and has a shape along the beam portion, and a support portion to which the beam portion and the protective portion are fixed. <P>COPYRIGHT: (C)2009,JPO&INPIT |
