发明名称 FLASH MEMORY AND MANUFACTURING METHOD OF THE SAME
摘要 A flash memory and a manufacturing method of the same includes a shallow trench isolation and an active region formed at a substrate, a plurality of stacked gates formed on and/or over the active region, a deep implant region formed at a lower portion of the shallow trench isolation and the active region between the stacked gates and a shallow implant region formed at a surface of the active region between the stacked gates.
申请公布号 US2009065840(A1) 申请公布日期 2009.03.12
申请号 US20080200423 申请日期 2008.08.28
申请人 PARK SUNG-KUN 发明人 PARK SUNG-KUN
分类号 H01L21/265;H01L29/788 主分类号 H01L21/265
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