发明名称 Method for correcting measuring errors caused by the lens distortion of an objective
摘要 A method for correcting the measuring errors caused by the lens distortion of an objective in a coordinate measuring machine is disclosed. For a plurality of different types of structures, the lens distortion caused by an objective is determined in an image field of the objective. The position of a type of structure is determined in the image field of the objective by a measuring window. The correction of the lens distortion required for the type of structure to be measured is retrieved from the database as a function of the type of structure to be measured.
申请公布号 US2009070059(A1) 申请公布日期 2009.03.12
申请号 US20080231481 申请日期 2008.09.03
申请人 VISTEC SEMICONDUCTOR SYSTEMS GMBH 发明人 HEIDEN MICHAEL;ADAM KLAUS-DIETER
分类号 G01P21/00;G01N21/00 主分类号 G01P21/00
代理机构 代理人
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