发明名称 |
Method for correcting measuring errors caused by the lens distortion of an objective |
摘要 |
A method for correcting the measuring errors caused by the lens distortion of an objective in a coordinate measuring machine is disclosed. For a plurality of different types of structures, the lens distortion caused by an objective is determined in an image field of the objective. The position of a type of structure is determined in the image field of the objective by a measuring window. The correction of the lens distortion required for the type of structure to be measured is retrieved from the database as a function of the type of structure to be measured.
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申请公布号 |
US2009070059(A1) |
申请公布日期 |
2009.03.12 |
申请号 |
US20080231481 |
申请日期 |
2008.09.03 |
申请人 |
VISTEC SEMICONDUCTOR SYSTEMS GMBH |
发明人 |
HEIDEN MICHAEL;ADAM KLAUS-DIETER |
分类号 |
G01P21/00;G01N21/00 |
主分类号 |
G01P21/00 |
代理机构 |
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代理人 |
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主权项 |
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地址 |
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