发明名称 Hard coating, target for forming hard coating, and method for forming hard coating
摘要 <p>The present invention attempts to provide a hard coating which has excellent hardness and lubricity. Such attempt has been completed by providing a hard coating comprising (Al 1-a V a ) (C 1-x N x ) wherein 0.27 ‰¤ a ‰¤ 0.75, and 0.3 ‰¤ X ‰¤ 1, wherein a and X independently represent an atomic ratio.</p>
申请公布号 EP1688513(B1) 申请公布日期 2009.03.11
申请号 EP20060001204 申请日期 2006.01.20
申请人 KABUSHIKI KAISHA KOBE SEIKO SHO 发明人 YAMAMOTO, KENJI
分类号 C23C14/06;C23C14/32;C23C14/34;C23C14/35 主分类号 C23C14/06
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