Method for producing trichlorosilane and method for producing polycrystalline silicon

摘要

A hydrogenation reaction vessel (101) makes STC-containing substance react with hydrogen to convert the substance into TCS. A low boils removal column (102) separates a chlorosilane distillate discharged from a hydrogenation reaction vessel (101) into TCS and a mixture distillate containing hyper-hydrogenated chlorosilane, and circulates the mixture distillate containing hyper-hydrogenated chlorosilane to the hydrogenation reaction vessel (101). The mixture distillate containing the hyper-hydrogenated chlorosilane separated in the low boils removal column (102) is circulatingly supplied to the hydrogenation reaction vessel (101). Accordingly, low boils by-product conventionally wasted is circulated and recycled in the process, which results in enhancing a yield of TCS production.