| 摘要 |
A nano wire grid polarizer and a manufacturing method thereof are provided to enhance a reflectivity, a cohesive force, and an adhesive force by forming material having a coefficient of thermal expansion and a work function in-between a metal and photo hardening material on a plurality of micro structures made of the photo hardening material. A protrusion type nano structure(22) is formed on a transparent substrate(21). A first metal layer(23) is formed on the nano structure, and is made of a metal having a high adhesive force about the nano structure made of polymer. The first metal layer is formed by using Cr, alloy of Cr/Ni, Ti, Si, or SiO2. Thickness of the first metal layer is 50~1000 angstrom. A second metal layer(24) is laminated on the first metal layer, and is made of a high reflectivity metal. Deposition thickness of the second metal layer is 1000~3000 angstrom. A surface boundary is formed from a surface of the second metal layer to an inner side. A void is formed in an end of the surface boundary.
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