| 摘要 |
<p><P>PROBLEM TO BE SOLVED: To provide a displacement detecting method and device capable of quickly and highly precisely detecting inter-image displacement and an image processing method, an image processor, an inspecting device and an inspecting method using them. Ž<P>SOLUTION: In this displacement detecting method for detecting a displacement value between first image data and second image data, one-dimensional data acquired from the image data are Fourier-transformed (a step S6), and at least one frequency is extracted based on the result (a step S7), and a phase in the frequency is calculated (a step S8). Then, the inter-image displacement value is calculated based on a difference between the calculated phase and the phase in the frequency of the second image data (a step S9). Ž<P>COPYRIGHT: (C)2004,JPO Ž</p> |
