CHUCK ASSEMBLY FOR SUPPORTING WAFER,申请号KR20070089095-传众专利搜索

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发明名称	CHUCK ASSEMBLY FOR SUPPORTING WAFER
摘要
申请公布号	KR100888551(B1)	申请公布日期	2009.03.11
申请号	KR20070089095	申请日期	2007.09.03
申请人		发明人
分类号	H01L21/687;H01L21/00;H01L21/02	主分类号	H01L21/687
代理机构		代理人
主权项
地址

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