Sputter device with a tubular cathode and process of operating the sputter device,申请号EP20050028124-传众专利搜索

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发明名称	Sputter device with a tubular cathode and process of operating the sputter device
摘要
申请公布号	EP1804275(B1)	申请公布日期	2009.03.11
申请号	EP20050028124	申请日期	2005.12.22
申请人	APPLIED MATERIALS GMBH & CO. KG	发明人	HENRICH, JUERGEN;SAUER, ANDREAS;GEISS, ANDREAS;BRINCKMANN, FELIX
分类号	H01J37/34;C23C14/34	主分类号	H01J37/34
代理机构		代理人
主权项
地址

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