发明名称
摘要 <p><P>PROBLEM TO BE SOLVED: To provide a method for manufacturing a multilayer quartz glass tube and a multilayer quartz glass rod having an intermediate layer comprising one or more layers. <P>SOLUTION: The method for manufacturing the multilayer quartz glass tube having the intermediate layer comprising one or more layers comprises: forming a rod-like multilayer quartz glass base material by using a quartz glass base tube as an outermost layer base material 1, a quartz glass base tube or a silica powder as an intermediate layer base material 2, and a quartz glass rod as an innermost layer base material 3; arranging a plug 20 on the axis center part of the end face of one end part of the multilayer quartz glass base material and a die 21 on the periphery of the one end part of the multilayer quartz glass base material; heating and softening the multilayer quartz glass base material successively from the end part of the multilayer quartz glass base material, moving it axially while rotating the multilayer quartz glass base material relatively to the plug and the die and force-feeding the multilayer quartz glass base material into a space formed by the plug and the die, thus piercing the innermost layer base material of the heated and softened part of the multilayer quartz glass base material and at the same time, press-welding the multilayer quartz glass base material. <P>COPYRIGHT: (C)2005,JPO&NCIPI</p>
申请公布号 JP4236037(B2) 申请公布日期 2009.03.11
申请号 JP20030361922 申请日期 2003.10.22
申请人 发明人
分类号 C03B20/00;H01L21/205;H01L21/22 主分类号 C03B20/00
代理机构 代理人
主权项
地址