| 摘要 |
<p>A light receiving section (15) and a substrate-side electrode pad (16) of a photoelectric conversion substrate (12), a base-side electrode pad (23) and an interconnect (25) arranged on a surface side of a base (18) are integrally coated with a protective layer (27). A scintillation layer (29) is formed on a surface side of the protective layer (27). Corrosion of a photoelectric conversion element (14) of the light receiving section (15), the electrode pads (16, 23) and the interconnect (25) is prevented by the protective layer (27). When they are integrally coated with the protective layer (27), the light receiving section (15) and the substrate-side electrode pad (16) of the photoelectric conversion substrate (12) can be arranged with a distance therebetween shortened, thereby realizing miniaturization of a detector and enlargement of the light receiving section (15).</p> |
