发明名称 THREE DIMENSIONAL COATING SYSTEM USING PHYSICAL VAPOR DEPOSITION
摘要 A three-dimensional coating apparatus employing physical vapor deposition is provided to coat an object uniformly regardless of its external shape by rotating the jig in order to form uniform coating on the side surface of the object and moving the deposition unit up and down in order to form uniform coating on the top and bottom surfaces of the object. A three-dimensional coating apparatus employing physical vapor deposition comprises a chamber(20) of cylindrical or hexahedral shape providing the internal space; a rectangular carriage(30) fixed to the bottom in the chamber; a plurality of jigs(40) which is combined with a connection part(41) on the upper side of the rectangular carriage, rotates along with the rotation of the connection part driven by a motor installed in the chamber, and fixes a coated object; and a deposition unit(50) provided on both sides of the chamber to be movable up and down.
申请公布号 KR20090025473(A) 申请公布日期 2009.03.11
申请号 KR20070090353 申请日期 2007.09.06
申请人 TERA PLASMA;VACOS CO., LTD. 发明人 KIM, YOUN TAEG;CHO, SANG MOO
分类号 C23C14/00 主分类号 C23C14/00
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