发明名称 DEVICE AND METHOD FOR DETECTING BROKEN EDGE OF GLASS SUBSTRATE
摘要 A device for detecting the broken edge of glass substrate is provided to minimize the failure rate of product and prevent the additional damage of the manufacturing equipment. A device for detecting the broken edge of glass substrate comprises at least one nozzle(20a,20b,20c) which is arranged on the upper side of a glass substrates(10), and emits the predetermined gas; at least one pressure sensor(30a,30b,30c) which is arranged on the lower surface of the glass substrates, and measures the pneumatic generated in nozzle; an air pressure control part(50) controlling the pressure of the air generated in nozzle; a controller(60) determining the damage of the glass substrates by comparing the measured air pressure of the pressure sensor with standard air pressure value.
申请公布号 KR20090025394(A) 申请公布日期 2009.03.11
申请号 KR20070090195 申请日期 2007.09.06
申请人 YUN, YONG HYN 发明人 YUN, YONG HYN
分类号 H01L21/66 主分类号 H01L21/66
代理机构 代理人
主权项
地址