BATCH PROCESSING CHAMBER WITH DIFFUSER PLATE AND INJECTOR ASSEMBLY
摘要
申请公布号
EP2032737(A2)
申请公布日期
2009.03.11
申请号
EP20070761764
申请日期
2007.05.02
申请人
APPLIED MATERIALS, INC.
发明人
YUDOVSKY, JOSEPH;NGO, TAI T.;TEJAMO, CESAR;MAHAJANI, MAITREYEE;MCDOUGALL, BRENDAN;HUANG, YI-CHIAU;COOK, ROBERT C.;KIM, YEONG K.;TAM, ALEXANDER;BRAILOVE, ADAM A.;GHANAYEM, STEVE G.
