SEMICONDUCTOR MANUFACTURING EQUIPMENT AND METHOD FOR PROCESSING OF THE SAME

摘要

A semiconductor manufacturing apparatus and a processing method thereof are provided to reduce a transferring time of a container by transferring the container from a transferring room to a storage shelf through a container transferring robot. A container(100) loading a wafer is outputted or inputted in a load port(300). A container transferring robot(400) transfers the container from the load port. The container transferred by the container transferring robot is settled in a stocker(500). A transferring chamber(600) includes a wafer transferring robot(610) loading the wafer outputted from the container to a boat. A processing unit(700) is connected to the transferring chamber through an outlet of the boat.