APPARATUS FOR FORMING THIN FILM USING ECR PLASMA, METHOD OF FILM DEPOSITION USING THE SAME, SUBSTRATE FOR TOUCHPANNEL HAVING TRANSPARENT CONDUCTING LAYER

摘要

Plasma deposition equipment, a layer deposition method using the equipment, and a touch panel substrate having a transparent conductive film are provided to form a uniform film on a substrate for display. Plasma deposition equipment comprises a plasma device(20) and a process chamber(10) in which the evaporation on a substrate is made. The plasma device includes a linear antenna(23) whose both ends are combined in two resonated microwave generators(21), a plasma generator connected to the linear antenna, and a magnetic field generating apparatus which is formed in the shape corresponding to the linear antenna and creates a magnetic field in the space between the linear antenna and the substrate of the process chamber.