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发明名称
SAWING TILE CORNERS ON PROBE CARD SUBSTRATES
摘要
申请公布号
EP2033001(A2)
申请公布日期
2009.03.11
申请号
EP20070797808
申请日期
2007.05.25
申请人
FORMFACTOR, INC.
发明人
ELDRIDGE, BENJAMIN N.;MATHEWS, PETER B.;SHINDE, MAKARAND S.;HOBBS, ERIC D.;HENSON, ROY J.
分类号
H01L31/00
主分类号
H01L31/00
代理机构
代理人
主权项
地址
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