APPARATUS AND METHOD FOR MEASURING DISPLACEMENT

摘要

Apparatus for measuring displacement that measures the displacement (the irregularities) of the surface of a measuring object precisely and at high speed is provided. The apparatus for measuring displacement scans light radiated toward the surface of the measuring object and measures the amount of displacement of the surface of the measuring object without contact based upon the position of an image formation point formed on the light receiving plane of a light receiving element. Light receiving means is provided with a lens array composed of plural condenser lenses which converges measuring beams and an imaging lens for forming an image formation point on the light receiving plane by converged measuring beams. Reflected light from an irradiation point is converged by the lens array. The converged reflected light is imaged on the light receiving plane by the imaging lens.