| 摘要 |
A non-contact actuator is located on a substrate 10 and includes at least a plate 30 and a bushing 31. When a voltage is applied externally between the actuator and substrate 10, the plate 30 is bent by attraction of the substrate 10 but does not contact the substrate 10. A counteraction force is generated within the plate 30 to withstand the electrostatic force of the substrate 10. After the voltage is removed, the counteraction force and an elastic tension generated by recovering from a curved state of the plate 30 to an original state generate a bouncing motion of the plate 30 and the bushing 31 to produce a step motion or movement of the actuator with respect to the substrate 10. |
