| 摘要 |
A wet station is provided to improve a processing solution discharging speed by circulating the processing solution inside a processing tub in a horizontal direction. A processing tub(110) includes an inner tub(112) receiving a processing solution. A processing liquid discharge unit(120) is equipped in the bottom of the processing tub and discharges the processing solution. A fluid supply unit(130) supplies the fluid to the processing tub to circulate the processing solution inside the processing tub in a horizontal direction.
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