MEMS AND OPTICAL MODULATOR HAVING TEMPERATURE COMPENSATION LAYER

摘要

A MEMS structure having a temperature correction layer and an optical modulator using the same are provided to enhance accuracy and reliability of a device operation by resolving a thermal deformation problem in a MEMS(Micro Electro Mechanical System) structure. An insulating layer(120) is positioned on a substrate(110), and is used as an etch stop layer. A bottom mirror is formed on the insulating layer, reflects/diffracts an incident light, and is made of various light reflective materials. A sacrificial layer(130) is positioned on the insulating layer. Both sides of the sacrificial layer support a ribbon layer(140) by etching a part of the sacrificial layer. A center part of the ribbon layer is separated in order to secure a driving space. The ribbon layer is made of silicone nitride based material. A piezoelectric driving body(150) is positioned on both sides of the ribbon layer. The piezoelectric driving body includes a bottom electrode(151), a piezoelectric layer(152), and a top electrode(153). A temperature correction layer(154) is formed on a top surface and a bottom surface of the piezoelectric driving body.