RECYCLING PROCESS OF WASTE PHOTORESIST STRIPPER

摘要

A process for recycling waste photoresist stripper is provided to save costs and to improve the environment by recycling stripper solvent included in the photoresist stripper regardless of the composition of the photoresist stripper waste water. A process for recycling waste photoresist stripper comprises the steps of: (i) removing impurities having low boiling points by distilling the first the photoresist stripper waste water; (ii) firstly recycling waste water into the stripper solvent composition by distilling the photoresist stripper waste water from which the low boiling impurity is removed while removing impurities having high boiling points; and (iii) secondly recycling the product from (ii) step to make each stripper solvent component into individual stripper solvent composition by distilling the stripper solvent composition successively.