发明名称 Dual tip atomic force microscopy probe and method for producing such a probe
摘要 One inventive aspect is related to an atomic force microscopy probe. The probe comprises a tip configuration with two probe tips on one cantilever arm. The probe tips are electrically isolated from each other and of approximately the same height with respect to the cantilever arm. The outer surface of the tip configuration has the shape of a body with a base plane and an apex. The body is divided into two sub-parts by a gap located approximately symmetrically with respect to the apex and approximately perpendicular to the base plane. Another inventive aspect related to methods for producing such an AFM probe.
申请公布号 US7500387(B2) 申请公布日期 2009.03.10
申请号 US20060495162 申请日期 2006.07.28
申请人 INTERUNIVERSITAIR MICROELEKTRONICA CENTRUM VZW (IMEC) 发明人 FOUCHIER MARC
分类号 G01B5/28;G01Q60/24;G01Q60/30;G01Q60/38;G01Q70/10 主分类号 G01B5/28
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