| 摘要 |
A method of manufacturing a replica diffraction grating includes the steps of: forming a metal thin film on a grating surface of a master diffraction grating, adhering a replica substrate to the metal thin film via an adhesive, and removing the replica substrate so that the metal thin film in a reverse state is adhered on the replica substrate. In the method, before forming the metal thin film on the grating surface of the master diffraction grating, the grating surface is coated with a fluorine surface treating agent as a release agent. Then, the metal thin film is formed with vacuum vapor deposition.
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