发明名称 |
Probe beam profile modulated optical reflectance system and methods |
摘要 |
The present invention provides a probe beam profile-modulated optical reflectivity metrology system having a modulated pump source for exciting the sample. A separate probe beam is directed to interact with the sample in a manner so that the rays within the probe beam create a spread of angles of incidence. A detector array simultaneously measures intensities of the rays within the reflected/diffracted probe beam simultaneously at different angles of incidence. The intensity and angle of incidence information is used to analyze the sample.
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申请公布号 |
US7502104(B2) |
申请公布日期 |
2009.03.10 |
申请号 |
US20070890712 |
申请日期 |
2007.08.06 |
申请人 |
KLA-TENCOR CORPORATION |
发明人 |
SALNIK ALEX;NICOLAIDES LENA;OPSAL JON |
分类号 |
G01N21/00 |
主分类号 |
G01N21/00 |
代理机构 |
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代理人 |
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主权项 |
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地址 |
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