发明名称 DEVICE FOR CONTROLLING A TEMPERATURE
摘要 A temperature controller is provided to improve the productivity by shortening the time to increase the temperature of the drug solution up to the target temperature. A temperature controller comprises a temperature sensor(110) detecting the temperature of the drug solution; a heating part(200) heating up the drug solution if the temperature of the drug solution is lower than the target temperature by comparing the temperature of the drug solution with the target temperature; temperature controller(130) which outputs the first and second controlling signals to the heating part. The heating part comprises a heating element(230) heating up the drug solution and a heating driving part(210) providing the electricity to the heating element.
申请公布号 KR20090025027(A) 申请公布日期 2009.03.10
申请号 KR20070090053 申请日期 2007.09.05
申请人 SEMES CO., LTD. 发明人 KIM, JANG HYUN;LEE, SUNG JIN
分类号 H01L21/3063 主分类号 H01L21/3063
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